Original title: Collection contrast in the immersion objective lens of the scanning electron microscope
Authors: Müllerová, Ilona ; Konvalina, Ivo ; Mika, Filip
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: Signal trajectories of secondary (SE) and backscattered electrons (BSE) were simulated for two cases: an immersion magnetic objective lens (OL) alone and for the case when an electrostatic immersion objective lens is added. Micrographs of a semiconductor structure are presented for these two set-ups.
Keywords: backscattered electrons; cathode lens; scanning electron microscope; secondary electrons
Project no.: FR-TI3/323 (CEP)
Funding provider: GA MPO
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0210780

Permalink: http://www.nusl.cz/ntk/nusl-124472


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers