Název:
Influence of methane concentration on diamond film morphology and growth rate
Autoři:
Ižák, Tibor ; Babchenko, Oleg ; Kromka, Alexander ; Potměšil, Jiří ; Hruška, Karel Typ dokumentu: Příspěvky z konference Konference/Akce: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Rok:
2011
Jazyk:
eng
Abstrakt: In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
Klíčová slova:
methane concentration; microcrystalline; nanocrystalline diamond; Raman; SEM Číslo projektu: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), IAAX00100902 (CEP), MEB0810081 (CEP) Poskytovatel projektu: GA MŠk, GA AV ČR, GA AV ČR, GA MŠk Zdrojový dokument: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5
Instituce: Fyzikální ústav AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0208098