Original title: Displacement Interferometry in Passive Fabry-Perot Cavity
Authors: Lazar, Josef ; Číp, Ondřej ; Oulehla, Jindřich ; Pokorný, Pavel ; Fejfar, Antonín ; Stuchlík, Jiří
Document type: Papers
Conference/Event: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Year: 2011
Language: eng
Abstract: We present techniques oriented to improvement of precision in incremental interferometric measurements of displacements over a limited range where the atmospheric wavelength of the coherent laser source is either directly stabilized to a mechanical reference or is corrected to fit to the reference. This may represent a reduction of uncertainty linking the laser wavelength not to indirectly evaluated refractive index but to the setup mechanics which cannot be completely eliminated. Here we suggest an approach where the traditional interferometers are replaced by a passive Fabry-Perot cavity with position sensing using an intracavity transparent photodetector.
Keywords: interferometry; nanometrology; nanopositioning; refractometry
Project no.: CEZ:AV0Z20650511 (CEP), CEZ:AV0Z10100521 (CEP), GA102/09/1276 (CEP), GPP102/11/P820 (CEP), KAN400100701 (CEP), LC06007 (CEP)
Funding provider: GA ČR, GA ČR, GA AV ČR, GA MŠk
Host item entry: NANOCON 2011. 3rd International Conference, ISBN 978-80-87294-27-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0208053

Permalink: http://www.nusl.cz/ntk/nusl-109897


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers