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Chemická depozice diamantových tenkých vrstev z par plynů
Kromka, Alexander
Příprava diamantových vrstev a jejich (nano-) struktur vyžaduje zvládnutí více technologických kroků. V prvním kroku „diamantové technologie” je důležité aktivovat povrch nediamantové podložky vhodným procesem známým jako nukleace nebo zárodkování. Nejčastěji se jedná o proces pokrytí povrchu podložky (nano-) částicemi diamantu nebo aktivace povrchu podložky iontovým bombardováním. Druhým klíčovým krokem je samotný růst diamantové vrstvy tzv. chemickou depozicí z par plynů (tzv. „Chemical Vapor Deposition” - CVD) za nízkých tlaků (10 ÷ 10 000 Pa) a teplot v rozsahu 250 ÷ 1000 °C, která je nejčastěji realizována v plynné směsi metanu a vodíku v systému žhaveného vlákna nebo mikrovlnného plazmatu. V tomto příspěvku jsou oba technologické kroky, nukleace a růst, diskutovány se zřetelem aktuálních trendů a experimentálních aktivit probíhajících v laboratořích Fyzikálního ústavu AV ČR (FZÚ).\n
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XXIV Czech-Polish seminar: Structural and ferroelectric phase transitions: Book of abstracts and program
Pokorný, Jan ; Bubnov, Alexej ; Janovská, Marie
This is the Book of Abstracts for the XXIV Czech-Polish Seminar (CPSEM-2022 conference) held in Harrachov (Czech Republic) on May 23 - 27, 2022. The special objective of the conference is expressed in the conference subtitle: Structural and Ferroelectric Phase Transitions. The continuous worldwide interest to this conference series is proving that it has a respected position within the series of International/European conferences covering all interdisciplinary field of the research related to structural and ferroelectric phase transitions. At the CPSEM-2022 conference there were about 100 participants from 10 countries delivered 8 tutorial lectures for early stage researchers, 8 invited lectures and selected 34 oral contributions. More than 55 posters were presented during two poster sessions.
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Emergence of dark ZnO nanorods by hydrogen plasma treatment
Remeš, Zdeněk ; Buryi, Maksym ; Sharma, Dhananjay K. ; Artemenko, Anna ; Mičová, J. ; Rezek, B. ; Poruba, A. ; Hsu, H.S. ; Potocký, Štěpán ; Babin, Vladimir
We employed a custom-built inductively coupled plasma (ICP) 13.56 MHz reactor with up to 300 W RF discharge power. Hydrothermally grown ZnO nanorods were exposed to the ICP plasma with a mixture of hydrogen and argon for up to 30 min, followed in-situ by plasma oxidation. Plasma properties were monitored by optical emission spectroscopy (OES) and by measuring the self-bias potential of the stainless steel sample holder separated from the ground by a blocking capacitor. The exciton-related UV photoluminescence of ZnO nanorods and optical absorption increases significantly after the plasma treatment. We attribute it to the complex changes of ZnO surface electronic states that also give rise to its black color visually.
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Development and measurement of gas sensors for room temperature applications
Kočí, Michal
Gas sensing properties of a nanocrystalline diamond with a hydrogen-terminated surface (H-terminated NCD) and a molybdenum disulphide (MoS2) are investigated as conductivity sensors with built-in interdigital metal electrode structures. The H-terminated NCD was prepared by plasma-enhanced chemical vapour deposition (PECVD), and the MoS2 by a carbide-free one-zone sulfurization method. The sensor's responses were measured for oxidizing (NO2) and reducing (NH3) gases by the same equipment and setup. The parameters of the tested sensors are compared and critically evaluated. Advantageously, the MoS2/H-terminated NCD heterostructure enhances the gas sensing response at room temperature compared to the H-terminated NCD and MoS2 layers.
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Plasma-synthesised zinc oxide nanoparticle behavior in liquids
Rutherford, D. ; Jíra, J. ; Kolářová, Kateřina ; Matolínová, I. ; Remeš, Zdeněk ; Kuliček, J. ; Padmanaban, D. ; Maguire, P. ; Mariotti, D. ; Rezek, B.
ZnO nanoparticles have been synthesized using non-thermal atmospheric pressure plasma (ZnO-NTP). We investigated the behavior of these ligand-free as a colloid suspension using different solvents, from deionized water to physiological saline and microbial culture broth. We found that the zeta potential of ZnONTP became more negative after exposure to microbial culture broth relative to water, which suggests increased colloid stability. Photoluminescence spectra of ZnO-NTP were similar regardless of liquid type, yet optical and fluorescent images of samples showed different agglomeration behaviour depending on liquid type. Scanning electron microscopy images revealed large agglomerates of ZnO-NTP interacting with the surface of bacteria cells, ranging in size from 200 nm up to 2 µm. We also studied effect of sub-lethal concentrations of ZnO-NTP on bacteria under illumination. There was no significant difference in viable bacteria concentration after 24h exposure to 10 µg/mL ZnO-NTP.
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Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers
Voves, J. ; Pošta, A. ; Davydova, Marina ; Laposa, A. ; Povolný, V. ; Hazdra, P. ; Lambert, Nicolas ; Sedláková, Silvia ; Mortet, Vincent
Epitaxial growth of diamond is critically important for the fabrication of diamond-based electronic devices. The emerging study of the epitaxial diamond growth on the (113) vicinal surfaces evidences highly needed high growth rates and low structural defects concentrations with both p- and n-type doping. In this work, we compare the morphology and dopant concentration incorporation of heavily boron-doped (113) epitaxial diamond layers with conventionally studied (100) and (111) epitaxial layers. Epitaxial layers were grown using resonance cavity Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) system. The surface morphology of epitaxial layers was studied by optical microscopy and atomic force microscopy, whereas the boron incorporation homogeneity was determined by Raman spectroscopy mapping.
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