Original title: SMV-2023-05: DI2023
Translated title: SMV-2023-05: DI2023
Authors: Matějka, Milan ; Krátký, Stanislav ; Meluzín, Petr ; Košelová, Zuzana ; Chlumská, Jana ; Horáček, Miroslav ; Kolařík, Vladimír ; Knápek, Alexandr
Document type: Research reports
Year: 2023
Language: cze
Abstract: [cze] [eng]

Keywords: e-beam lithography; microlithography; relief structure; silicon etching

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0347943

Permalink: http://www.nusl.cz/ntk/nusl-537226


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2023-12-17, last modified 2024-04-15


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