Original title: Estimation of mechanical parameters of thin films using finite element analysis
Authors: Tinoco Navaro, Hector Andres ; Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Chlupová, Alice ; Kruml, Tomáš ; Hutař, Pavel
Document type: Papers
Conference/Event: International Conference Applied Mechanics /20./, Myslovice (CZ), 20180409
Year: 2018
Language: eng
Abstract: This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge\ntest and a numerical approach. The methodology is based on the combination of finite element analysis with a\nclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm\nwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflection\nanalytical model. Error functions were constructed and minimized to delimit a coupled solution space\nbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties\ncan be determined due to that there is not unique solution in the estimations of these parameters. However, both\nelastic parameters were determined through the proposed numerical procedure which compares the deformed\nsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elastic\nproperties agree with corresponding values determined by other methods in the literature
Keywords: bulge test; elastic properties; finite element analysis; thin film
Project no.: EF16_013/0001823
Funding provider: GA MŠk
Host item entry: Applied Mechanics 2018, ISBN 978-80-261-0766-8

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0289462

Permalink: http://www.nusl.cz/ntk/nusl-393196

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Research > Institutes ASCR > Institute of Physics of Materials
Conference materials > Papers
 Record created 2019-03-14, last modified 2019-10-20

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