Název: Material design problems of plasma-chemical reactors for disposal perfluorinated compounds
Autoři: Brožek, Vlastimil ; Březina, Václav ; Mastný, L. ; Kubatík, Tomáš František ; Živný, Oldřich
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Conference on Chemical Technology, ICCT 2017/5./, Mikulov (CZ), 20170410
Rok: 2017
Jazyk: eng
Abstrakt: Reduction of perfluorinated gases emissions from semiconductor industry has recently introduced a serious problem from both technological and economic side. With respect to chemistry of the decomposition reactions the most effective abatement techniques developed up to now consists in the interaction of those gaseous pollutants with several types of plasmas. In the framework of Czech-Taiwanese bilateral project No. 17-10246J 'Decomposition of Perfluorinated Compounds and Fluorinated Ozone Depleting Substances' a new plasmochemical reactor design is to be solved. In this reactor the plasma abatement process consisting of interaction of the plasma generated by unique watter stabilized H-WSP plasma torch at temperatures ranging\nfrom 2000 K up to 25,000 K with the treated gases will be carried out. However, the main product generated in the reactor during the steam plasma abatement process is hydrogen fluoride which causes corrosion of almost every construction material. The aim pursued by the work presented is to search for the materials resistant to exposition of HF even at high temperatures. To investigate corrosion resistance of construction materials with thermal stability within temperature interval 2700-3000 °C titan nitride, boron nitride, and silicon carbide have been selected. The samples of those materials have been prepared by spark plasma sintering method and exposed to concentrated solution of hydrofluoric acid for which corrosion rates have been measured
Klíčová slova: boron nitride; perfluorinated compounds; silicon carbide; thermal plasma torch; titanium nitride
Číslo projektu: GC17-10246J (CEP)
Poskytovatel projektu: GA ČR
Zdrojový dokument: Proceedings of 5th International Conference on Chemical Technology, ISBN 978-80-86238-65-4, ISSN 2336-811X
Poznámka: Související webová stránka: www.icct.cz

Instituce: Ústav fyziky plazmatu AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0281865

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-371598


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Věda a výzkum > AV ČR > Ústav fyziky plazmatu
Konferenční materiály > Příspěvky z konference