Original title: Imaging of the voltage contrast in environmental SEM
Authors: Romanovský, Vladimír ; Autrata, Rudolf
Document type: Papers
Conference/Event: CSEM, Vranovská Ves (CZ), 2002-02-08 / 2002-02-09
Year: 2002
Language: eng
Abstract: Current methodology of imaging in the scanning electron microscopy is based on the detection of signal electrons that carry topografic and materialcontrast of specimens under study. Electronic devices can be observed because in their standard working mode voltage differences on component surfaces are visualized by means of the voltage contrast. This contrast can be acquired in nearly any commercially available scanning electron microscopeby detection and subsequent analysis of secondary electrons.
Keywords: contrast; detectors; environmental SEM; detektory
Project no.: GA102/01/1271 (CEP), CEZ:AV0Z2065902 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society, ISBN 80-238-8749-1

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101104

Permalink: http://www.nusl.cz/ntk/nusl-29542


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers