Název: Parameter Optimization of Multi-Level Diffraction Gratings
Autoři: Matějka, Milan ; Kolařík, Vladimír ; Horáček, Miroslav ; Král, Stanislav
Typ dokumentu: Příspěvky z konference
Konference/Akce: NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./, Brno (CZ), 20161019
Rok: 2017
Jazyk: eng
Abstrakt: Originally, the e-beam lithography (EBL) is a technique for creating high-resolution black and white masks for the optical lithography. Multi-level relief structures can be also prepared using EBL patterning. Their preparation is based on the image patterning with a gradient of exposure doses. Large-area multi-level structures can be effectively prepared using the electron beam pattern generator with a variable shaped beam. We present several writing strategies. Basically, the main writing strategy uses one stamp (i.e. one elementary exposure of the shaped electron beam) per one elementary area with the same exposure dose. This simple approach is fast and flexible, however it does not guarantee optimal results. The main problem is an imperfection of the stamps (size, shape, and homogeneity). Advanced algorithms are based on multiple\nexposure of the same elementary area, the total local exposure dose is a sum of several different elementary exposures (stamps). Using these algorithms, a smoother surface of the structure can be achieved. On the other hand, the writing speed is considerably decreased. Tradeoff between the achieved parameters and the writing speed is discussed for selected set of writing strategy algorithms.
Klíčová slova: e-beam pattern generator; grayscale lithography; multi-level grating; variable shaped beam
Číslo projektu: FR-TI1/576 (CEP), TE01020233 (CEP), LO1212 (CEP), ED0017/01/01
Zdrojový dokument: NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings, ISBN ISBN 978-80-87294-71-0

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0270769

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-264738


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference
 Záznam vytvořen dne 2017-04-04, naposledy upraven 2017-10-30.


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