Original title: Bandpass filter for secondary electrons in SEM - experiments
Authors: Mika, Filip ; Konvalina, Ivo ; Krátký, Stanislav ; Müllerová, Ilona
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Bandpass energy filtering using a through-the-lens secondary electron (TLD) detector in a field emission gun SEM (FEG-SEM) has been known over a decade. During energy filtering, image contrast is changed and new information about the material can be observed. Our motivation for this study was to compare theoretical calculations with the experimental data\nof the SE bandpass energy filter in Magellan 400 FEG SEM. The TLD detector works as a bandpass energy filter for the special setup of electrode potentials inside the objective lens, with the positive potential on the specimen regulating the energy window.
Keywords: electron microscopy; TLD
Project no.: TE01020118 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260337

Permalink: http://www.nusl.cz/ntk/nusl-253625


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Research > Institutes ASCR > Institute of Scientific Instruments
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