guest ::
| Home > Conference materials > Papers > Treatment of surfaces with slow electrons |
Original title:
Treatment of surfaces with slow electrons
Authors: Frank, Luděk ; Mikmeková, Eliška
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Historically, the most annoying obstacle to acquiring SEM micrographs, in particular higher magnification micrographs taken with the ambition of resolving the finest observable details, may be said to be carbonaceous contamination “highlighting” the previous field of view with a black rectangle contoured by an even darker frame. This contamination is generated by decomposition of adsorbed hydrocarbon molecules with incident electrons leaving a crosslinked\nlayer of carbon atoms as a surface coating. The darker contours come from high surface mobility of hydrocarbon molecules from outside the field. The situation has been improved in recent decades by a lower pressure and dryer vacuum in specimen chambers, but even under ultrahigh vacuum (UHV) conditions the phenomenon occurs due to hydrocarbon molecules deposited on the specimen when loaded. Therefore, only in-situ cleaning with an\nattachment producing an ion beam solves this problem in UHV, while some plasma cleaners have also started appearing in standard-vacuum SEM chambers. The goal of complete removal of hydrocarbons is motivated by the supposed unavoidability of their decomposition with primary electrons. However, we have found hydrocarbon molecules being released, rather than their decomposition, when the energy of the impinging electrons drops beneath 50 eV or so.
Keywords: electron microscopy; SEM; STEM
Project no.: TE01020118 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260332
Permalink: http://www.nusl.cz/ntk/nusl-253577
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Frank, Luděk ; Mikmeková, Eliška
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Historically, the most annoying obstacle to acquiring SEM micrographs, in particular higher magnification micrographs taken with the ambition of resolving the finest observable details, may be said to be carbonaceous contamination “highlighting” the previous field of view with a black rectangle contoured by an even darker frame. This contamination is generated by decomposition of adsorbed hydrocarbon molecules with incident electrons leaving a crosslinked\nlayer of carbon atoms as a surface coating. The darker contours come from high surface mobility of hydrocarbon molecules from outside the field. The situation has been improved in recent decades by a lower pressure and dryer vacuum in specimen chambers, but even under ultrahigh vacuum (UHV) conditions the phenomenon occurs due to hydrocarbon molecules deposited on the specimen when loaded. Therefore, only in-situ cleaning with an\nattachment producing an ion beam solves this problem in UHV, while some plasma cleaners have also started appearing in standard-vacuum SEM chambers. The goal of complete removal of hydrocarbons is motivated by the supposed unavoidability of their decomposition with primary electrons. However, we have found hydrocarbon molecules being released, rather than their decomposition, when the energy of the impinging electrons drops beneath 50 eV or so.
Keywords: electron microscopy; SEM; STEM
Project no.: TE01020118 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA MŠk, GA MŠk
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260332
Permalink: http://www.nusl.cz/ntk/nusl-253577
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2016-07-11, last modified 2022-09-29