Název: Treatment of surfaces with slow electrons
Autoři: Frank, Luděk ; Mikmeková, Eliška
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Rok: 2016
Jazyk: eng
Abstrakt: Historically, the most annoying obstacle to acquiring SEM micrographs, in particular higher magnification micrographs taken with the ambition of resolving the finest observable details, may be said to be carbonaceous contamination “highlighting” the previous field of view with a black rectangle contoured by an even darker frame. This contamination is generated by decomposition of adsorbed hydrocarbon molecules with incident electrons leaving a crosslinked\nlayer of carbon atoms as a surface coating. The darker contours come from high surface mobility of hydrocarbon molecules from outside the field. The situation has been improved in recent decades by a lower pressure and dryer vacuum in specimen chambers, but even under ultrahigh vacuum (UHV) conditions the phenomenon occurs due to hydrocarbon molecules deposited on the specimen when loaded. Therefore, only in-situ cleaning with an\nattachment producing an ion beam solves this problem in UHV, while some plasma cleaners have also started appearing in standard-vacuum SEM chambers. The goal of complete removal of hydrocarbons is motivated by the supposed unavoidability of their decomposition with primary electrons. However, we have found hydrocarbon molecules being released, rather than their decomposition, when the energy of the impinging electrons drops beneath 50 eV or so.
Klíčová slova: electron microscopy; SEM; STEM
Číslo projektu: TE01020118 (CEP), LO1212 (CEP), ED0017/01/01
Poskytovatel projektu: GA TA ČR, GA MŠk, GA MŠk
Zdrojový dokument: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Poznámka: Související webová stránka: http://www.trends.isibrno.cz/

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0260332

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-253577


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference