Original title: Very low energy STEM/TOF system
Authors: Daniel, Benjamin ; Radlička, Tomáš ; Piňos, Jakub ; Frank, Luděk ; Müllerová, Ilona
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./, Skalský dvůr (CZ), 20160529
Year: 2016
Language: eng
Abstract: Scanning low energy electron microscopes (SLEEMs) have been built at ISI for over 20 years, either by modification of commercially available SEMs with a cathode lens or completely self-built in case of a dedicated ultra-high vacuum scanning low energy electron microscope (UHV SLEEM). Recently, the range of detection methods has been extended\nby a detector for electrons transmitted through ultrathin films and 2D crystals like graphene. For a better understanding of interaction between low energy electrons and solids in general, and the image contrast mechanism in particular, it was considered useful to measure the energy of transmitted electrons. This allows a better comparison with simulations, which suffer from increasing complexity due to a stronger interaction of electrons with the density of states at low energies.
Keywords: elecvtron microscopy; SLEEM; UHV SLEEM
Project no.: 606988
Host item entry: Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-17-6
Note: Související webová stránka: http://www.trends.isibrno.cz/

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0260331

Permalink: http://www.nusl.cz/ntk/nusl-253576


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers