Original title: Measurement of current density distribution in shaped e-beam writers
Authors: Horáček, Miroslav ; Bok, Jan ; Kolařík, Vladimír ; Urbánek, Michal ; Matějka, Milan ; Krátký, Stanislav
Document type: Papers
Conference/Event: International Microscopy Congres /18./, Praha (CZ), 2014-09-07 / 2014-09-12
Year: 2014
Language: eng
Abstract: The ZrO W(100) Schottky cathode is used in our e-beam writing system working with a rectangular-shaped electron beam. The homogeneous angular current density distribution is crucial for quality of exposures of the shaped beam lithography systems. Two basic types of the angular emission distribution can be observed in dependence on the microscopic final end form shape of the emitter tip, with bright centre and more common dark centre. The stable operation of the cathode thus stable end form shape requires a delicate balance of parameters inside the gun which however can slightly change during cathode life time. This implies the necessity of analysing and periodical monitoring the current density distribution in e-beam. Four methods enabling this measurement are presented.
Keywords: current density; e-beam writer
Project no.: LO1212 (CEP), ED0017/01/01, TE01020118 (CEP)
Funding provider: GA MŠk, GA MŠk, GA TA ČR
Host item entry: 18th International Microscopy Congres. Proceedings, ISBN 978-80-260-6720-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238240

Permalink: http://www.nusl.cz/ntk/nusl-177526


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Research > Institutes ASCR > Institute of Scientific Instruments
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