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Depozice tenkých vrstev Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. pomocí dvoutryskového RF plazmatického systému s efektem duté katody
Hubička, Zdeněk ; Virostko, Petr ; Olejníček, Jiří ; Deyneka, Alexander ; Adámek, Petr ; Valvoda, V. ; Jastrabík, Lubomír ; Šícha, Miloš ; Tichý, M.
Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. High density pulse modulated RF hollow cathode discharge was generated in ceramic nozzles made of SrTiO3 and BaTiO3. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure. Time resolved Langmuir probe system and plasma impedance monitor were used for ´in situ´ plasma diagnostics and control of deposition conditions.
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Elektronová rozdělovací funkce ve vnější koroně laserového plazmatu
Mašek, Martin ; Rohlena, Karel
The electron distribution function in a laser plasma is evaluated from the Euler-Vlasov model with a weak collisional term by a solution using the transform method. In the temporal evolution of the distribution we recorded a strong article trapping in the potential troughs of the electrostatic wave generated by the Raman back-scattering and also a cascading due to a secondary scattering of the generated Raman wave.
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