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SMV-2023-63: Measuring interferometric systems
Mikel, Břetislav
The contract research was focused on the development of multi-axis measuring systems using the most accurate method of measurement based on the principle of laser radiation interference. The basic reference is a laser source with a wavelength of 633 nm. Measuring systems are intended for devices requiring measurement accuracy in the order of nanometers.
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SMV-2023-61: Measuring systems for lithographers
Mikel, Břetislav
The contract research was focused on the development of multi-axis measuring systems using the most accurate method of measurement based on the principle of laser radiation interference. The basic reference is a laser source with a wavelength of 633 nm. Measuring systems are intended for devices requiring measurement accuracy in the order of nanometers.
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