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Application of Kelvin Probe Force Microscopy on Two-Dimensional Structures
Švarc, Vojtěch ; Kunc,, Jan (referee) ; Kolařík, Vladimír (referee) ; Bartošík, Miroslav (advisor)
The presence of water molecules strongly influences the function of solution-based biosensors and ambient operating gas sensors. Water molecules accelerate the charge diffusion on the surface of insulating parts, induce sensor hysteresis, and affect sensors' stability, resistance response, and sensitivity. Therefore, it is essential to understand the behaviour of charge motion influenced by water on the sensor surface. To better understand sensor behaviour and its immediate surroundings under controlled humidity, this study utilizes measurements of transport properties and simultaneous measurement of macroscopic resistance response with mapping of the local surface potential using Kelvin probe force microscopy (KPFM). As a chosen model, the 2D graphene Hall bar structure in the field-effect transistor (FET) architecture was fabricated and optimized. The results indicate that the charge dissipation from the main graphene channel to its insulating surroundings exponentially increases with relative humidity. The amount of this leakage charge can be further tuned by the gate voltage of the FET sensor. Further findings show that the charge diffusing into adjacent SiO2 parts minimally influences the conductivity of the graphene main channel. Simultaneous measurements of resistivity and KPFM on graphene-based sensors deepen the understanding of water's impact on the sensor's active parts and the diffusion of charge on passive insulating parts. These findings could benefit future designs of active graphene parts of the sensor and surface modifications of its insulating parts.
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Optoelectronic characterization of perovskite materials and their application in photovoltaics
Ulč, Filip ; Konečný, Martin (referee) ; Klok, Pavel (advisor)
This bachelor's thesis is focused on a detailed correlative study of optoelectronic perovskite materials through advanced measurement techniques employed at the Institute of Physical Engineering. These techniques include surface charge measurement and time-resolved photoluminescence mapping. Currently, there are few publications or articles attempting to analyze optical and electrical processes using more than two techniques simultaneously. Therefore, the aim of this thesis is to expand the knowledge of existing techniques and enhance them by incorporating surface charge analysis (in the dark and under illumination) using Kelvin Probe Force Microscopy (KPFM). The contribution of this work to the study of perovskite materials lies in correlative measurements that provide new insights into the arrangement and movement of charge carriers, which can be utilized in the research of perovskite solar cells.
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Local oxidation of graphene using atomic force microscopy
Vymazal, Jan ; Špaček, Ondřej (referee) ; Bartošík, Miroslav (advisor)
This bachelor’s thesis aims to local anodic oxidation (LAO) using atomic force microscopy. Local anodic oxidation appers like promising method for preparing prototypes of graphene nanostructures. It may be utilised in fabrication of nanoelectronics, biosensors or Hall pro bes. Modified graphene is studied using atomic force microscopy (measuring topography, KPFM) and Raman spectroscopy. This work is studying influence of the loading force, number of layers and the substate on the result of LAO.
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In-situ characterization of semiconductors using scanning probe microscopy techniques
Očkovič, Adam ; Pléha, David (referee) ; Pavera, Michal (advisor)
The thesis focuses on the analysis of semiconductor components using scanning probe microscopy. In the first part, crystalline substances are classified according to their electrical properties. Then, the theory of intrinsic and extrinsic semiconductors, PN transitions and finally the basic types and functions of transistors are introduced. In the second section, SPM techniques and their principles of operation are presented, which are suitable for failure analysis of semiconductor devices. The third chapter introduces the measurement setup, which consists of a scanning electron microscope MIRA and a scanning probe microscope LiteScope, which uses self-sensing probes. In the fourth chapter, the semiconductor samples analyzed were tungsten plugs in a cross-section of CMOS chip, a cross-section of bipolar transistor, and a lamella of unipolar MOSFET transistor. Analysis of these samples was performed using AFM, CAFM, EFM, KPFM and SSRM techniques in the last chapter. For each technique and sample, an analysis of the measured data was performed. Together with the techniques, the basic limitations and interesting outputs for failure analysis were presented.
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The Use of AFM Measurement Method in Crystalline Silicon Solar Cells Technology
Mojrová, Barbora ; Boušek, Jaroslav (referee) ; Hégr, Ondřej (advisor)
This thesis deals with the use of Atomic Force Microscopy (AFM) and Kelvin Probe Force Microscopy (KPFM) in solar cells production. Both techniques measure surface properties using interactions between surface and tip that progressively scans entire surface of the sample. Atomic force microscopy allows three dimensional imaging of surface structure. Kelvin probe force microscopy is used to measure the contact potential difference on the sample surface. There are described experimental measurements of monocrystalline and multicrystalline substrates after various etching processes using AFM. By using KPFM the contact potential difference was measured on dielectric layers PSG, SiOX, SiNX and Al2O3 and on selective emitter structures. All experiments described in this work were carried out at the Solartec Ltd. workplace and they completely correspond with the actual technology of crystalline solar cells production.
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Mechanical excitation of self sensing SPM probes
Novotný, Ondřej ; Piastek, Jakub (referee) ; Pavera, Michal (advisor)
This bachelor thesis deals with the development of the SPM microscope probe holder which is designed for mechanical excitation of the probes. The first part of the thesis focuses on the description of physical theory, such as the principle of atomic force microscopy, the function of piezoceramics and the description of used quartz tunning fork based probes. The second part describes the gradual development and design of the new probe holder. Testing of the designed probe holder and comparison of mechanical and electric excitation is depicted at the end of this work. The designed probe holder was manufactured, the assembly procedure was described, and the drawings of the individual parts were created.
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