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SMV-2023-58: Design of Electron Optical Elements
Radlička, Tomáš
The contractual research covered design of new genration of secondary electron detector for the multibeam scanning electron microscope. We also calculated the electron optical properties of NiCol column with hexapole corrector of spherical aberration.
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SMV-2021-43: Electron Optical Systems Design and Simulations
Radlička, Tomáš
The contractual research covered several feasibility studies in the field of electron-optical design and simulations. We studied several electron-optical systems, including calculating the electron-optical properties, optimizing the design, and possible integration into the primary beam column. The contractual research also covered development of software packages for the electron optical design and their integration to the Julia language environment.
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SMV-2020-31: Electron Optical Elements Design and Simulations
Radlička, Tomáš
The contractual research covered several feasibility studies in the field of electron-optical design and simulations. We studied several electron-optical elements, including calculating the electron-optical properties, optimizing the design, and possible integration into the primary beam column. We used the differential-algebraic method for the calculation of aberrations and wave-optical calculations for the analysis of resolution. We also analyzed the effect of misalignment aberrations. Besides the electron-optical design, we studied the possibility of the construction of the element with graphene foil.
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Řešení složitých elektronově optických problémů v EOD
Lencová, Bohumila
The paper summarizes the possibilities of accurate computation of potential with the first order finite element method and highly accurate ray tracing in numerically computed fields, which were implemented in the EOD program. The use of the program is illustrated on the results of computation of third order aberration coefficients of an electrostatic mirror and by the computation of correctors of axial aberrations of electron microscopes.
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Programs for design of systems in particle optics
Lencová, Bohumila ; Zlámal, J. ; Jánský, P.
The paper describes a number of programs used by us in the design of systems for surface studies and deposition that simulate the focusing, transport and deflection of charged particles. In deposition and implantation systems often quite intense beams of ions are used where the space charge effects become prohibitive. Therefore we have extended our 2D FEM program EOD, equipped with a Windows graphical interface, with an option to compute space charge limited beams.
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Vybrané příklady našich výpočtů
Lencová, Bohumila ; Jánský, Pavel ; Zlámal, J.
The paper discusses the properties of the program EOD (Electron Optical Design), which contains interfaces for Windows, integrates all programs for 2D computations by the first order FEM, ray tracing in computed fields, simulation of electron and ion sources, and computation of space charge limited beams. Most parts of the software are in the beta development phase, and they are already used in a number of our projects. For example, it was used to simulate the behavior of ion optical systems for the ion beam deposition at TU Brno by including the plasma creation inside the ion gun as well as space charge effects in ion beams transported in the system. Electron guns with space charge effects can be computed as well, as illustrated on the example of the well-known Pierce electron gun. Graphical possibilities are illustrated on a 3D cut-away view of the electron gun for electron-beam welding
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Nejnovější vývoj software pro částicovou optiku
Lencová, Bohumila
The paper gives an overview of the development of software for electron optics in ISI. New problems and applications force us to improve existing programs, to get better results from them, which requires continuous improvements of our own software. We are also trying to improve the user interface, which should run under Windows operating system. For processing of large amount of data, e.g. from the computation of optical properties, it is reasonable to use as much as possible other well-known tools like EXCEL to take over some of the processing of computation outputs
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