Original title: SMV-2023-58: Design elektronově optických systémů
Translated title: SMV-2023-58: Design of Electron Optical Elements
Authors: Radlička, Tomáš
Document type: Research reports
Year: 2023
Language: cze
Abstract: [cze] [eng]
V rámci smluvního výzkum byla navržená nová generace systému pro detekci sekundárních elektronů v multibeam skenovacím elektronovém mikroskopu. Dále jsme popsali optické vlastnosti NiCol tubusu s hexapolovým korektorem sférické aberace. The contractual research covered design of new genration of secondary electron detector for the multibeam scanning electron microscope. We also calculated the electron optical properties of NiCol column with hexapole corrector of spherical aberration.
Keywords: aberrations; electron optical design; resolution

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0349178

Permalink: http://www.nusl.cz/ntk/nusl-613891


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Research > Institutes ASCR > Institute of Scientific Instruments
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