Original title: Programs for design of systems in particle optics
Authors: Lencová, Bohumila ; Zlámal, J. ; Jánský, P.
Document type: Papers
Conference/Event: Role of physics in future applications: from nanotechnology to macroelectronics, Tři Studně (CZ), 2002-06-10 / 2002-06-15
Year: 2002
Language: eng
Abstract: The paper describes a number of programs used by us in the design of systems for surface studies and deposition that simulate the focusing, transport and deflection of charged particles. In deposition and implantation systems often quite intense beams of ions are used where the space charge effects become prohibitive. Therefore we have extended our 2D FEM program EOD, equipped with a Windows graphical interface, with an option to compute space charge limited beams.
Keywords: electron optical design; ion beam implantation; particle optics
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: International summer school: Role of physics in future applications: from nanotechnology to macroelectronics

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101228

Permalink: http://www.nusl.cz/ntk/nusl-29590


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers