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Automatic system for gauge blocks calibration optimized for legal length metrology
Buchta, Zdeněk ; Šarbort, Martin ; Čížek, Martin ; Hucl, Václav ; Řeřucha, Šimon ; Pikálek, Tomáš ; Dvořáčková, Š. ; Dvořáček, F. ; Kůr, J. ; Konečný, P. ; Lazar, Josef ; Číp, Ondřej
This paper presents a contactless system for automatic and contactless gauge blocks calibration based on combination of laser interferometry and low-coherence interferometry. In the presented system, the contactless measurement of the absolute gauge block length is done as a single-step operation without any change in optical setup during the measurement. The optical setup is combined with compact gauge block changer with capacity 126 gauge blocks, which makes the resulting system fully automatic. \nThe paper also presents in detail a set of optimization steps which have been done in order to transform the original experimental setup into the automatic system which meets legal length metrology requirements. To prove the measurement traceability, we conducted a set of gauge block length measurement comparing data from the optimized system and the established reference system and TESA–UPC operated in Czech Metrology Institute laboratory.
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Interferometric measurement system for cost effective e-beam writer
Řeřucha, Šimon ; Šarbort, Martin ; Lazar, Josef ; Číp, Ondřej
The reliability of nanometer track writing in the large scale chip manufacturing process depends mainly on a precise positioning of the e-beam writer moving stage. The laser interferometers are usually employed to control this positioning, but their complicated optical scheme leads to an expensive instrument which increases the e-beam writer’s manufacturing costs. We present a new design of an interferometric system useful in a currently developed cost effective e-beam writers. Our approach simplifies the optical scheme of known industrial interferometers and shifts the interference phase detection complexity from optical domain to the digital signal processing part. Besides the effective cost, the low number of optical components minimizes the total uncertainty of this measuring instrument. The scheme consists of a single wavelength DFB laser working at 1550 nm, one beam splitter, measuring and reference reflectors and one photo-detector at the interferometer output. The DFB laser is frequency modulated by slight changes of injection current while the interference intensity signal is processed synchronously. Our algorithm quantifies the phase as two sinusoidal waveforms with a phase offset equal to the quarter of the DFB laser wavelength. Besides the computation of these quadrature signals, the scale linearization techniques are used for an additional suppression of optical setup imperfections, noise and the residual amplitude modulation caused by the laser modulation. The stage position is calculated on basis of the DFB laser wavelength and the processed interference phase. To validate the precision and accuracy we have carried out a pilot experimental comparison with a reference interferometer over the 100 mm measurement range. The first tests promise only 2 nm deviation between simplified and the reference interferometer.
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Active Angular Alignment of Gauge Blocks in Double-Ended Interferometers
Buchta, Zdeněk
This paper presents a method implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.
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