|
|
Current state and prospects of scintillation materials for detectors in SEM
Schauer, Petr ; Bok, Jan
The two principal quantities are important for assessing the quality of each imaging system. Firstly, it is the detective quantum efficiency (DQE), which is primarily a measure of image noise. As the DQE is determined by signal to noise ratio (SNR), the efficient and noise-free components are the key to the high DQE. Second, not less important indicator of image quality is also the modulation transfer function (MTF). MTF describes the ability of adjacent pixels to change from black to white in response to patterns of varying spatial frequency, and hence it determines the actual capability to show fine detail, whether with full or reduced contrast. Using a scanning imaging system the fast components are the key to the good MTF. In a scintillation electron detector of scanning electron microscope (SEM) the scintillator is the most crucial component, because it significantly influences both the DQE and MTF. The aim of this study is to assess the scintillation materials suitable for SEM detectors characterized by the both high efficiency and fast decay characteristic.
|
|
|
Quality assessment of scintillation detector in SEM using MFT
Bok, Jan ; Schauer, Petr
One of the recent trends in S(T)EM is increasing of the e-beam scanning speed. In general, higher speeds decrease object degradation and prevent image artifacts caused by slow electrical discharging. However, the increase of the scanning speed is limited by the time response of the segnal-electron detector. When the detector response is slower than the scanning speed, it can have negative influence to the quality of the scanned image, such as contrast reduction and image blurring. Usually, the rise and fall edges of the time response curve to a square electron pulse have more complex form, such as a multi-exponential function of time. Evaluate and compare the time-dependent edges in contex of their influence on the image quality is rather complicated. Therefore, we propose to express the detector time response by the modulation transfer function (MTF), which contains all relevant information. It can give the answer to the important question, what maximum scanning speed can be used not to significantly decrease the image quality.
|
|
|
Energy loss in the conductive layer on single crystal scintillator surface
Flodrová, E. ; Neděla, Vilém
This work deals with study of mechanisms of loosing signal electron energy in the single crystal scintillator which depend on the type and thickness of the conductive layer on the surface. The types and amount of loss processes will he described. Monte Carlo simulations were performed for quantification of energy loss for individual processes and materials which are commonly used in scintillations detection systems.
|
|
| |
|
| |
|
| |
guest ::
