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Original title:
Current state and prospects of scintillation materials for detectors in SEM
Authors: Schauer, Petr ; Bok, Jan
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: The two principal quantities are important for assessing the quality of each imaging system. Firstly, it is the detective quantum efficiency (DQE), which is primarily a measure of image noise. As the DQE is determined by signal to noise ratio (SNR), the efficient and noise-free components are the key to the high DQE. Second, not less important indicator of image quality is also the modulation transfer function (MTF). MTF describes the ability of adjacent pixels to change from black to white in response to patterns of varying spatial frequency, and hence it determines the actual capability to show fine detail, whether with full or reduced contrast. Using a scanning imaging system the fast components are the key to the good MTF. In a scintillation electron detector of scanning electron microscope (SEM) the scintillator is the most crucial component, because it significantly influences both the DQE and MTF. The aim of this study is to assess the scintillation materials suitable for SEM detectors characterized by the both high efficiency and fast decay characteristic.
Keywords: scintillation materials; SEM
Project no.: GAP102/10/1410 (CEP), EE.2.3.20.0103
Funding provider: GA ČR, GA MŠk
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215698
Permalink: http://www.nusl.cz/ntk/nusl-136002
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Schauer, Petr ; Bok, Jan
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./, Skalský dvůr (CZ), 2012-06-25 / 2012-06-29
Year: 2012
Language: eng
Abstract: The two principal quantities are important for assessing the quality of each imaging system. Firstly, it is the detective quantum efficiency (DQE), which is primarily a measure of image noise. As the DQE is determined by signal to noise ratio (SNR), the efficient and noise-free components are the key to the high DQE. Second, not less important indicator of image quality is also the modulation transfer function (MTF). MTF describes the ability of adjacent pixels to change from black to white in response to patterns of varying spatial frequency, and hence it determines the actual capability to show fine detail, whether with full or reduced contrast. Using a scanning imaging system the fast components are the key to the good MTF. In a scintillation electron detector of scanning electron microscope (SEM) the scintillator is the most crucial component, because it significantly influences both the DQE and MTF. The aim of this study is to assess the scintillation materials suitable for SEM detectors characterized by the both high efficiency and fast decay characteristic.
Keywords: scintillation materials; SEM
Project no.: GAP102/10/1410 (CEP), EE.2.3.20.0103
Funding provider: GA ČR, GA MŠk
Host item entry: Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-87441-07-7
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0215698
Permalink: http://www.nusl.cz/ntk/nusl-136002
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2013-01-16, last modified 2021-11-24