Národní úložiště šedé literatury Nalezeno 1 záznamů.  Hledání trvalo 0.01 vteřin. 
Application of oxygen atomic beams
Mikerásek, Vojtěch ; Čech, Vladimír (oponent) ; Mach, Jindřich (vedoucí práce)
This diploma thesis describes the design, construction, and testing of a thermal atomic oxygen beam source for the growth of thin oxide layers under ultra-high vacuum conditions. The first chapter discusses the theory associated with thermal dissociation and atomic beam formation. Then, the main types of atomic oxygen beam sources and their applications are presented. The experimental part is devoted to the actual design, construction and assembly of the device. The last part describes the testing of the effect of atomic oxygen on the formation of oxide layers (stoichiometrically Ga2O3) on Ga nanodroplets prepared by molecular beam epitaxy on a Si substrate. The chemical composition and morphology of the prepared nanostructures are studied by XPS, SEM and TEM.

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