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Scanning Very Low Energy Electron Microscopy
Müllerová, Ilona ; Hovorka, Miloš ; Mikmeková, Šárka ; Pokorná, Zuzana ; Mikmeková, Eliška ; Frank, Luděk
Recent developments in applications of the scanning very low energy electron microscopy in selected branches of materials science are reviewed. The examples include visualization of grains in conductive polycrystals including ultrafine grained metals, identification of the local crystal orientation upon reflectance of very slow electrons, transmission mode with ultrathin free-standing films including graphene, acquisition of a quantitative dopant contrast in semiconductors, and examination of thin surface coverages.
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Transmission mode in scanning low enery electron microscope
Müllerová, Ilona ; Hovorka, Miloš ; Frank, Luděk
We incorporated the cathode lens (CL) principle, well known from the emission microscope, to the SEM in order to operate at very low landing energies. The primary beam electrons of several keV are decelerated to nearly zero energy of landing on the specimen negatively biased to high potential. Reflected electrons are collected on a grounded detector situated above the sample but the same can be done below the sample of a fair transparency for electrons. High collection efficiency and high amplification of both detectors is secured thanks to the cathode lens field. We use a scintillation detector for the reflected mode and a semiconductor structure for the transmitted electron (TE) mode. In this arrangement resolution of few nm is obtainable across the full energy range.
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Optical and scanning electron microscopies in examination of ultrathin foils
Konvalina, Ivo ; Hovorka, Miloš ; Fořt, Tomáš ; Müllerová, Ilona
Very low energy scanning transmission electron microscopy is emerging as a novel tool for examination of ultrathin foils to learn more about the electron structure of solids. The electron micrographs provide image contrasts governed by the effective thickness of the sample proportional to the inner potential and at lowest energies the local density of electron states in the direction of impact of the electron wave starts to dominate. The optical methods are used during the sample preparation. The laser confocal microscope Olympus Lext OLS 3100 was used for preliminary observations of the 3 nm C foil prepared by magnetron sputtering in nitrogen atmosphere on a flat glass covered by a disaccharide layer.
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