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Ionization detector for environmental scanning electron microscope
Melechovský, Ondřej ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
Presented work deals with environmental scanning electron microscopy. The construction of the device is described concisely in the beginning. Important part is devoted to interaction of electrons with specimen and signals emitted from the specimen. The work aims especially at detection of secondary electrons using the ionization detector. Experimentally is determined effect of working environment and size of electrode system of ionization detector on detected signal.
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Influence of working conditions on the signal level detected by LVSTD detector
Tylich, Ondřej ; Zimáková, Jana (referee) ; Čudek, Pavel (advisor)
This bachelor project includes information about function of low vacuum scanning electron microscope and describes it’s parts. It explains the difference between low vacuum and high vacuum scannig electron microscope. Contains informations about creation and detection of secondary electrons using scintillation detectors. It describes the calculation of signal to noise ratio and the method for obtaining the values of signal. Project is focused to determine the value of signal with a change in working conditions obtained by using Low Vacuum Secondary Electron Detector TESCAN (LVSTD). The aim is to determine the stability of the effect of working conditions on LVSTD.
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Ionization detector of secondary electrons for environmental scanning electron microscope
Dušek, Petr ; Zimáková, Jana (referee) ; Čudek, Pavel (advisor)
This thesis deals with problematics of a detection of secondary electrons by ionization detector for environmental scanning electron microscope. In this thesis is described the difference between scanning electron microscope and environmental scanning electron microscope. Further there is described emission and detection of the choosen signals that arise while primary electrons are interacting with a specimen in scanning electron microscope. A special emphasis is placed on a description, sorting and on the form of detection of secondary electrons. In thesis there is described principle of a function of ionization a scintilation detectors. Experimental part of thesis describes design of 3 different elctrode systems of a tabular ionization detector, which will be intended to be placed in environmental scanning electron microscope. Based on measuring with the detectors, with experimental design, there is chosen one with the highest quality of signal detection.
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Scintillation SE detector for ESEM
Odehnal, Adam ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
Thesis deals with theoretical knowledge about scanning electron microscopy and environmental scanning electron microscopy. It describes principle of operation, signals generated by interaction between primary electron beam and specimen and means of detection of secondary electron signal in environmental conditions using scintillation detector. Furthermore, thesis focuses on optimization of detection od secondary electrons by adjusting electrode system of scintillation detector. Computer program Simion is used for modelling signal electron trajectories for proper adjustments. Simulation were starting-point for adjusting the design of the detector. Detection efficiency of adjusted detector was determined by evaluating signal magnitude from captured images, secondary electron detection capability from voltage contrast and quality of the captured images from signal/noise ratio.
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Comparison of microscopic diagnostic methods
Veselý, Jakub ; Tihlaříková, Eva (referee) ; Čudek, Pavel (advisor)
This thesis deals with the description and comparison of diagnostic methods, transmission electron microscopy, scanning electron microscopy and atomic force microscopy. The introduction is a description of diagnostic methods. The following experimental section dealing with the diagnosis of ferritic chromium steel sample methods of scanning electron microscopy, atomic force microscopy, transmission electron microscopy and the evaluation and interpretation of measured results. The conclusion provides a comparison, the advantages and disadvantages of diagnostic methods.
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Scintillation Secondary Electrons Detector for ESEM
Čudek, Pavel ; Kadlec, Jaromír (referee) ; Rek, Antonín (referee) ; Jirák, Josef (advisor)
The thesis deals with the scintillation secondary electron detector for environmental scanning electron microscope, its design and construction. The starting point was numerical simulation of electrostatic fields and electron trajectories in the electrode system of the detector and simulation of pressure distribution and flow of gases in different parts of the detector. On the basis of modeling and simulation, construction changes of the detector were gradually implemented. Detection efficiency of each version of the detector was determined by the method described in the work. This method enables to evaluate signal level from the captured images of the specimen, quality of images was stated from signal to noise ratio. The thesis describes the whole process of the detector improvement from initial state, when the detector operated with lower efficiency in the pressure range from 300 to 900 Pa, to final version that enables usage of the detector in the range from vacuum up to 1000 Pa of water vapors in the specimen chamber of the microscope.
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Concept and Development of Single-purpose Scanning Electron Microscope
Foret, Zdeněk ; Vašina, Radovan (referee) ; Starý,, Vladimír (referee) ; Svoboda, Milan (referee) ; Švejcar, Jiří (advisor)
Electron microscopy has become an essential component in many scientific fields, in which it contributes to new discoveries. The microscopy itself is continually being developed and the limits, which seemed to be insurmountable, have been overcome. The instruments have become user friendlier and their mobility enables flexible practical use in the field. The subject of this work is the design of a scanning electron microscope, the calculation of a magnetic curcuit of an immersion objective combined with standard lens, the theoretical calculation of a microscope resolution and the design solution of the mechanical parts of the microscope with a sample manipulator. The thesis includes a description of the electron microscopy development summarizing it briefly from the very beginning up to now. It also deals with electron sources, especially the Shottky cathode, which is to be the main object observed by the proposed device. The work also contains a description of the calculation of the microscope resolution as a function of the current density distribution. Another interesting issue included in the theoretical part is the signal detection, a description of several types of detectors and possible signal processing. The solution of the thesis includes a description of the concept of the scanning electron microscope with an explanation of the distribution of combined lens functions. The optical diagram shows the arrangement of the electron optics system and the distibution of pressure in the chamber of the microscope. The theoretical calculation is devoted to the magnetic curcuit design of the objective and to the resolution of the microscope for a given extent of working distances. Two modifications of the lens were designed – a standard simple objective and a combination of the standard objective with the immersion magnetic one. The results of both modifications are given for the parameters to be compared. The combined objective was designed with the possibility of use in two modes, as a standard and immersion lens. The deflection system is also divided into two modes, as a single deflection for the standard lens and as a two-dimension deflection for the immersion lens. Detectors for secondary electrons (SE) and detectors for back scattered electrons (BSE) will be used for the signal detection. The design of the microscope is another large part, which gives details on the most significant components of the microscope. The content of the technical solution is a three-dimensional computer model, created in Autodesk Inventor, which also includes a sample manipulator driven by piezoelectric actuators.
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Signal Detection by Segmental Ionization Detector in Environmental SEM
Černoch, Pavel ; Jirák, Josef (advisor)
The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
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Detection of Signal Electrons in High Pressure Conditions in Environmental Scanning Electron Microscopy
Neděla, Vilém ; Jirák, Josef (advisor)
The thesis deals with the study of properties of a new system for detection of true secondary and backscattered electrons in high pressure conditions of the specimen chamber of a newly built environmental scanning electron microscope AQUASEM II. Detection system contains three detectors. For the first time is introduced and analyzed the working principle of ionisation detector with electrostatic separator, which is in many experiments compared with ionisation detector of secondary electrons. Experimentally demonstrated are unique properties of this detection system, especially the ability of energy separation of detected signal electrons. For the various working conditions are also analyzed signal levels detected by the BSE YAG detector, which is designed as a part of the new detection system and which worked together with both ionisation detectors.
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