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Programy pro elektronově optický návrh
Lencová, Bohumila ; Oral, Martin
The paper gives a brief overview of computational method used in the Institute of Scientific Instruments of AS CR for the design of electron optical devices. New possibilities of the software are then illustrated on the computations of spot profile in a scanning electron microscope with low energy and Wien filter.
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Návrh nízkoenergiového REM
Vlček, Ivan ; Lencová, Bohumila ; Horáček, Miroslav
Our aim is to redesign the low-energy SEM (a scanning LEEM) in an UHV apparatus designed in our institute to allow the detection of the angular distribution of signal electrons. For this purpose we have to separate the signal electrons from the primary beam with a Wien filter and project the image of the back-focal plane of the objective lens on an area-sensitive detector (a back-illuminated CCD). Therefore we have to design a new electrostatic optics working in UHV
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