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Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications
Jarušek, Jaromír ; Chmela, Ondřej (referee) ; Gablech, Imrich (advisor)
In this work, nitride layers, their applications in bioelectronics, and methods of chemical vapour deposition and physical vapour deposition are presented. The focus of this work is the preparation of titanium nitride thin films by reactive sputtering using Kaufman ion-beam sources. Thin films were deposited on silicon wafers and microslides. Deposited titanium nitride thin films are characterized by X-ray diffraction, four-point probe sheet resistance measurement and profilometry to determine residual stress.
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Laboral task of variables measurement by position MEMS sensor
Jarůšek, Jakub ; Vančík, Silvester (referee) ; Hubálek, Jaromír (advisor)
MEMS technology and her products are very used today. One of these products are accelerometers, which are highly used for determining orientation, wear measurement or seismology. Their functions are used for consumer electronics, even for development or diagnostics. For more demanding applications, especially for determining orientation, are used components named gyroscopes (alone or with cooperation with accelerometers).
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Remote fault monitoring system
Jarůšek, Jakub ; Trčka, Tomáš (referee) ; Škarvada, Pavel (advisor)
In practice, optical non-contact measurement of distance and displacement is divided into various methods that use a different parameter of the optical (light) signal. Some methods are explained in the work. The triangulation method is described in more detail. This method is used to measure and monitor the displacement of geological faults. For this monitoring, a low-budget device is designed, which uses lasers and a sensor to determine the displacement of the measured object in a certain time interval. The whole system will serve as verification of data measured by magnetoresistive sensors.
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Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications
Jarušek, Jaromír ; Chmela, Ondřej (referee) ; Gablech, Imrich (advisor)
In this work, nitride layers, their applications in bioelectronics, and methods of chemical vapour deposition and physical vapour deposition are presented. The focus of this work is the preparation of titanium nitride thin films by reactive sputtering using Kaufman ion-beam sources. Thin films were deposited on silicon wafers and microslides. Deposited titanium nitride thin films are characterized by X-ray diffraction, four-point probe sheet resistance measurement and profilometry to determine residual stress.
|
|
|
Remote fault monitoring system
Jarůšek, Jakub ; Trčka, Tomáš (referee) ; Škarvada, Pavel (advisor)
In practice, optical non-contact measurement of distance and displacement is divided into various methods that use a different parameter of the optical (light) signal. Some methods are explained in the work. The triangulation method is described in more detail. This method is used to measure and monitor the displacement of geological faults. For this monitoring, a low-budget device is designed, which uses lasers and a sensor to determine the displacement of the measured object in a certain time interval. The whole system will serve as verification of data measured by magnetoresistive sensors.
|
|
|
Laboral task of variables measurement by position MEMS sensor
Jarůšek, Jakub ; Vančík, Silvester (referee) ; Hubálek, Jaromír (advisor)
MEMS technology and her products are very used today. One of these products are accelerometers, which are highly used for determining orientation, wear measurement or seismology. Their functions are used for consumer electronics, even for development or diagnostics. For more demanding applications, especially for determining orientation, are used components named gyroscopes (alone or with cooperation with accelerometers).
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