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Contamination in semiconductor fabrication
Fojtášková, Helena ; Salyk, Ota (referee) ; Čech, Vladimír (advisor)
This bachelor thesis deals with contamination in the production of semiconductor substrates. It focuses on the efficiency and optimization of wet cleaning processes for monocrystalline silicon and silicon carbide semiconductor wafers. The thesis includes a literature research in the field of semiconductor manufacturing, wafer contamination and wafer cleaning processes. The most commonly studied metal contaminants include iron, copper and nickel, due to their high diffusivity, and therefore these elements were chosen for the experimental part. In the experimental part, wafers were prepared by targeted contamination to verify the effectiveness of the cleaning processes. Contamination analysis was performed using the vapour phase decomposition method combined with inductively coupled plasma mass spectrometry (VPD-ICP-MS) for silicon wafers and total reflection X-ray fluorescence (TXRF) for silicon carbide wafers. Based on the measurement results, the efficiency of the washing processes was evaluated and a procedure for process optimization was recommended.
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Electrochemical characterization of bioelectronic systems
Runštuková, Nikola ; Salyk, Ota (referee) ; Ehlich, Jiří (advisor)
The aim of this thesis was electrochemical characterization of 24 microbial fuel cells platform for high-throughput screening of electrogenic microorganisms and comparison of measured values across all the fuel cells. In the theoretical part, there is a description of electrogenic bacteria, which are essential for current genereation in microbial fuel cells, description of microbial fuel cells and methods used for their characterization. In experimental part, there is a description of assembly process of the platform and measurement process. The result of this thesis is characterization of the platform before and after inoculation using open-circuit potential measurement, continuous current measurement, cyclic voltametry, linear sweep voltametry and electrochemical impedance spectroscopy. Thanks to this methods the values of open-circuit potencial, maximum power and internal resistance were obtained and their distribution was compared. These performed experiments verified the correct function of presented fuel cell platform.
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Electro-optical sensor for the detection of extracellular ions
Bellan, Boris ; Salyk, Ota (referee) ; Vala, Martin (advisor)
The aim of this work was to prepare a platform based on electrochemical transistor that would allow both electrical and optical detection of ion exchange between the electrolyte and the layer of organic semiconductor. Semiconductor that have been used in this work was poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate). The main goal was to verify whether the proposed platform meets the requirements of both characterization methods, and whether the sensitivity in the given arrangement is sufficient for the required range of analyte concentrations. The work also dealt with the study of the stability of the prepared platform in selected solvents and culture media, at the same time the method of optimizing the preparation of the photoresist foil and the completion of the OECT measuring cell was studied. A suitable solvent for polymethyl methacrylate was sought so that it did not affect the surrounding parts of the platform. Based on the obtained results, it was found that the selected photoresist for the preparation of the spacer frame is not suitable. However, it was found that the proposed platform satisfies both characterization methods. Therefore, it will be necessary to replace the current photoresist with a new, more chemically stable one.
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Low Energy Solid-State Converters for Energy Harvesting
Znbill, Laila ; Husák, Miroslav (referee) ; Salyk, Ota (referee) ; Boušek, Jaroslav (advisor)
Disertační práce je zaměřena na nízkoenergetické konvertory pro zpracování energie. Pro fotovoltaické generátory pracující při nízké úrovní osvětlení byly navrženy konvertory založené na konfiguraci single cell. Pomocí levných výrobních procesů a dostupných materiálů byl navržen a vyroben jednoduchý a spolehlivý termogenerátor. Výrobní postupy využívaly plazmatické aktivace povrchu pomocí výboje s dielektrickou bariérou a modifikované metody depozice PEDOT. Byly navrženy jednoduché a spolehlivé DC/DC měniče pro nízkonapěťové aplikace jako termoelektrické generátory a fotovoltaické články v konfiguraci single cell. Měniče pracují od napětí několika desítek mV a výstupní napětí může být na úrovni několika voltů. Účinnost se blíží 50% a náklady na materiál a výrobu jsou ve srovnání s použitím běžně dostupných integrovaných obvodů pro Energy Harvesting výrazně nižší. Pro řídicí obvody byly použity bipolární tranzistory, které v režimu velmi malých proudů mohou mít napájecí napětí od 0,5 V. Byla ověřena možnost výroby integrovaných obvodů s extrémně nízkým provozním napětím. Tranzistory FET zde pracují v podprahovém režimu a v režimu Bulk-driven.
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Advanced materials for organic bioelectronics
Sedlák, Jiří ; Salyk, Ota (referee) ; Weiter, Martin (advisor)
This bachelor thesis deals with the research of PEDOT:DBSA material for possible use in organic bioelectronics. First, a method for preparing PEDOT:DBSA layers of required thickness was standardized and the dependence of the thickness on the conductivity of the material was monitored. Subsequently, the effect of thermal stabilization and EG, DMSO and H2SO4 substances on the conductivity of prepared layers was tested. Two principles were tested to increase conductivity. The first was the principle of adding substances as dopands into liquid polymeric solutions. The second method of sample preparation was the method of secondary treatment of already prepared layers of pure PEDOT:DBSA. All of prepared polymeric layers were characterize by two methods: four point probe and profilometry.
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New organic semiconductors for bioelectronics
Malečková, Romana ; Salyk, Ota (referee) ; Vala, Martin (advisor)
This thesis focuses on the characterization of PEDOT:DBSA, a new semiconducting polymer for use in bioelectronic devices. It also deals with possibilities of surface treatment in order to enhance its biocompatibility and stability in aqueous environments. For this purpose, the organic polymer films were crosslinked with two crosslinking agents – GOPS and DVS. The ability of these agents to prevent leaching of some fractions of the polymer films in an aqueous environment and the ability to bind polymer molecules to each other as well as to the glass substrate was studied using the delamination test. Subsequently, the effects of these crosslinking agents on the film properties essential for the proper functions of bioelectronics made of these materials, was studied by contact angle measurements and four-point probes respectively. Moreover, several OECTs were prepared using original and crosslinked material as an active layer and were characterized by measuring transconductance and volumetric capacitance. PEDOT:DBSA has been shown to be a suitable material for use in bioelectronics, but its thin layers need to be stabilized in an aqueous environment. The agent DVS appears to be unsuitable for this purpose, mainly due to its insufficient film stabilization and its increased hydrophilicity of the film surface, thus increased tendency to interact with water, resulting in degradation of these thin layers. In contrast, GOPS, despite some reduction in film conductivity, has been able to stabilize the polymer layer over the long term, and thus appears to be a suitable way to stabilize PEDOT:DBSA.
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Printed Biosensor Based on Organic Electrochemical Transistor
Omasta, Lukáš ; Mikula, Milan (referee) ; Boušek, Jaroslav (referee) ; Salyk, Ota (advisor)
Organické elektronické zariadenia sú vyvíjané ako vhodné riešenia senzorov pre bioelektroniku, a to najmä kvôli dobrej biokompatibilite organických polovodičov v nich použitých. Takzvané biosenzory dokážu premeniť elektrochemické procesy na elektronický signál. Matrica takýchto biosenzorov môže simultánne skenovať množstvo biologických vzoriek, alebo rôznych tkanív v živých systémoch. Aktívnou súčasťou zariadenia je organický elektrochemický tranzistor (OECT). V tejto práci je diskutovaný teoretický rámec fungovania takéhoto zariadenia, jeho elektrická charakterizácia, aplikácia v biosenzoroch na báze buniek, spôsoby výroby a aktuálnym stavom techniky v oblasti organickej elektroniky. Experimentálna časť obsahuje konkrétne výrobné postupy vývoja OECT zariadení, ktoré boli použité v našom laboratóriu. Hlavný dôraz sa kladie na schopnosť vyrobených zariadení detekovať reakciu a monitorovať stimuláciu elektrogenných buniek. Za týmto účelom boli vyvinuté matice mikroelektródových OECT zariadení založených na polovodivom polyméri PEDOT:PSS. Tieto boli vyrobené s využitím bežnými tlačiarenských techník (atramentová tlač a sieťotlač) spolu so štandardnými litografickými postupmi. Najnovšie nami vyvinuté zariadenia dosahujú najväčšieho zosílením signálu, g = 2,5 mS a časovú konštantu t = 0,15 s. Tieto zariadenia sú porovnateľné, často dokonca lepšie ako niektoré iné najmodernejšie a plne litograficky pripravené senzory.
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Microelectrode arrays for mioelectronic
Bráblíková, Aneta ; Vala, Martin (referee) ; Salyk, Ota (advisor)
Organic electronic biosensors are developed as suitable devices that can transform electrochemical processes within the cell membrane into an electronic signal and enable to measure electrical activity of excitable cells and tissues both in vitro and in vivo and thus represent valuable alternative to current cell monitoring methods. In this work we focus on the fabrication of electrophysiological sensors based on organic semiconductors printed by the material printing method. Microelectrode arrays (MEAs) are active components of the device, which can monitore cellular activity and above that stimulating cells with electrical pulses. The proposed platform should be used for cytotoxicity of potential drugs especially on cardiac cells (cardiomyocytes). The experimental part focus on specific production processes of platforms, which were prepared in the laboraty with emphasis on biocompatibility and conductivity of device.
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Preparation and characterization of perovskite solar cells
Juřík, Karel ; Salyk, Ota (referee) ; Pospíšil, Jan (advisor)
This work deals with the perovskite photovoltaic cells. The first part summarises the basic information about this technology and shows the most important milestones in its development. Following part includes the parameters required to characterise the electric properties of a photovoltaic cell and the assessment of its quality. The experimental part of this thesis aims to describe the influence of the annealing time of the perovskite active layer on the final efficiency of created solar cells. The best results were determined to be achieved with the annealing time of 90 minutes.
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Generation of ozone by photochemical processes in CO2
Kucserová, Aneta ; Salyk, Ota (referee) ; Mazánková, Věra (advisor)
The bachelor thesis deals with the measurement of ozone concentration, which was produced by dielectric barrier discharge, corona discharge and UV lamp. The concentration of ozone in the air was also measured. The theoretical part deals with the basic properties of ozone, its use and determination of concentration by various methods. In the experimental part, ozone generation is described by the above-mentioned discharges.
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