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Determination of device geometrical misalignments influence on dimensional measurements in X-ray microcomputed tomography
Blažek, Pavel ; Klapetek, Petr (referee) ; Zikmund, Tomáš (advisor)
Tato práce se zabývá geometrickými nepřesnostmi v geometrii rentgenového počítačového tomografu (CT přístroj). Především jejich vlivem na výsledky metrologických měření a metodami kterými lze tyto negativní efekty eliminovat. V práci jsou prezentovány výsledky simulací CT měření v softwaru aRTist při kterých byli nastavovány nepřesnosti v pozici detektoru a osy rotace vzorku. Ukazuje se tak, které geometrické faktory mají na měření největší vliv. Praktická část se pak zabývá CT přístrojem HeliScan, který využívá unikátní rekonstrukční algoritmus k eliminaci geometrických nepřesností. Jsou vyvinuty referenční objekty (pláty s rubínovými kuličkami a zirkonová koule), které splňují požadavky normy VDI/VDE 2630 1.3. na testování metrologických schopností přístroje. Objekty vhodné pro měření ve větším zorném polem byly vyrobeny, zkalibrovány a otestovány v CT měření.
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Design and Realization of the Second Generation Imaging Reflectometer and its Application in Optical Analysis of Thin Films
Vodák, Jiří ; Držík,, Milan (referee) ; Klapetek, Petr (referee) ; Ohlídal, Miloslav (advisor)
The work deals with a technique of imaging spectroscopic reflectometry developed at The Institute of Physical Engineering, Brno University of Technology. The technique is well suited for characterization of samples non–uniform along their surfaces. The technique is primarily used for optical characterization of thin films. First part of the work is focused on basic physical principles of the technique and on ways in which measurement data are obtained. It contains a basic description of evaluating methods and a basic concept of an imaging spectroscopic reflectometer with a description of main parts of such a device. The main part of the work is focused on a description of two devices which were built at The Institute of Physical Engineering together with a description of some of upgrades which were implemented to these devices during their development. A description of measurements done with the two devices is also included. Last part of the work is then focused on further development of the technique. Intention of possible evolution of the technique to imaging spectroscopic ellipsometry is proposed.
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Luminescence of semiconductors studied by scanning near-field optical microscopy
Těšík, Jan ; Klapetek, Petr (referee) ; Křápek, Vlastimil (advisor)
This work is focused on the study of luminescence of atomic thin layers of transition metal chalkogenides (eg. MoS2). In the experimental part, the work deals with the preparation of atomic thin layers of semiconducting chalcogenides and the subsequent manufacturing of plasmonic interference structures around these layers. The illumination of the interference structure will create a standing plasmonic wave that will excite the photoluminescence of the semiconductor. Photoluminescence was studied both by far-field spectroscopy and near-field optical microscopy.
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Design of Low-Temperature Ultra High Vacuum Scanning Probe Microscopes
Pavera, Michal ; Klapetek, Petr (referee) ; Vetushka, Aliaksei (referee) ; Šikola, Tomáš (advisor)
This thesis deals with the development of scanning probe microscopes. Mechanical requirements for microscopes using measuring methods of scanning tunneling microscopy (STM) and atomic force microscopy (AFM) under enviroments of an ultrahigh vacuum (UHV) and variable temperatures are specified. Mechanical designs of two microscopes are discussed and their control electronics described. A special chapter is devoted to description of linear piezo manipulators and mechanical design of these prototypes.
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Surface topography and mechanical properties of thin films on tetravinylsilane basis
Plichta, Tomáš ; Klapetek, Petr (referee) ; Čech, Vladimír (advisor)
Proposed diploma thesis is focused on preparation and characterization of the plasma polymer thin films based on tetravinylsilane monomer (TVS). Plasma enhanced chemical vapour deposition (PECVD) method involving pulse and continual plasma discharge modes were used for thin film deposition on silicon wafer pieces. Reactive plasma composition was containing pure TVS or mixtures of TVS and argon or oxygen gas. Atomic force microscopy was used for surface topography and roughness characterization. Cyclic nanoindentation was involved to measurements to determine the Young’s modulus and hardness of prepared films and scratch test was performed to evaluate the degree of adhesion. Special attention was drawn to the characterization of films with a Young’s modulus below 10 GPa. Tip geometry of indenter influence on scratch test was also commented. Surface and mechanical properties of thin films in relation to the deposition conditions were correlated to the obtained results and final analysis of deposition conditions influence is proposed.
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Study of Thin-Film Surfaces
Trivedi, Rutul Rajendra ; Fejfar, Antonín (referee) ; Klapetek, Petr (referee) ; Šikola, Tomáš (referee) ; Čech, Vladimír (advisor)
Disertační práce se zabývá studiem povrchových vlastností jedno a vícevrstvých filmů deponovaných z vinyltriethoxysilanových a tetravinylsilanových monomerů. Zabývá se také charakterizací adheze jednovrstvých filmů z tetravinylsilanu. Plazmaticky polymerizované tenké vrstvy byly připraveny na leštěných křemíkových substrátech pomocí plazmové depozice z plynné fáze za ustálených podmínek. Povrchové vlastnosti vrstev byly charakterizovány pomocí různých metod rastrovací sondové mikroskopie a nanoindentačních technik jako je konvenční a cyklická nanoindentace. Vrypový test byl použit pro charakterizaci vlastností adheze vrstev. Jednovrstvé filmy připravené za různých depozičních podmínek byly charakterizovány s ohledem na povrchové morfologie a mechanické vlastností (modul pružnosti, tvrdost). Výsledky morfologie povrchu, analýzy zrn, nanoindentace, analýzy konečných prvků a modulů mapování pomohly rozlišit hybridní charakter filmů, které byly deponovány při vyšších výkonech RF-výboje. Nový přístup byl použit v povrchové charakterizaci vícevrstvého filmu pomocí rastrovací sondové mikroskopie a nanoindentace. Adhezívní chování plazmaticky polymerizovaných vrstev různých mechanických vlastností a tloušťek bylo analyzováno pomocí normálních a laterálních síl, koeficientu tření, a snímků vrypů získaných pomocí mikroskopie atomárních sil.
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Advanced Interferometric Methods of Coordinates Measurement
Holá, Miroslava ; Klapetek,, Petr (referee) ; Mrňa, Libor (referee) ; Lazar, Josef (advisor)
This thesis addresses particular topics in the field of the length metrology for nanometrology. Nanometrology deals with dimensional measurements of micro- and nanostructures with a high spatial resolution. It typically combines a microscope imaging with a precise coordinate measurement, usually capable of nanometre resolution using the state-of-art laser interferometry techniques. The development in this field is driven, among others, by emerging advanced nanotechnologies that demand to push further the capabilities and limits of the interferometric techniques to make the nanometre-level dimensional measurement of nanostructures possible. The principal limitations of current systems are the environmental conditions and especially the fluctuations in the refractive index of air. The theoretical part of this thesis aim at analysis of individual parts of laser interferometer. I oriented myself on the study of their advantages/disadvantages and further also the possibilities of their industrial applications. The second part of the thesis presents my work that focused on the influence of the refractive index of air (RIA) on the measurement uncertainty. I experimentally demonstrated an interferometric system with a self-cancellation RIA fluctuations: a transparent photodetector is used for the measurement of the standing wave along the axis of a passive resonator, where the resonator also serves as a reference for the laser wavelength stabilisation. Another optical arrangement, based on a setup of several Michelson interferometers, represents a combination of an interferometer and a refractometer into a single system. This setup was used to study the behaviour of the ambient airflow with respect to the optical path difference and physical separation of the interferometer’s and refractometer’s path. Based on the experimental results I proposed new arrangements for shape measuring interferometers, which combine length interferometry and a tracking refractometer for the direct compensation of RIA fluctuations with geometrically adjacent optical beams. The results indicate an improvement in RIA fluctuation induced uncertainty by a factor of 100. Third part describes the design and implementation of interferometric systems for specific applications. For the industrial environment I developed a compact interferometric displacement gauge which is designed to allow nanometre level measurement using a simplified interferometer construction. For coordinate measurement of the position of the sample up to six degrees of freedom, I realised a compact modular interferometric system, which represents a unique setup together with a stabilised laser source. To measure the position of the sample in an electron beam writer chamber, I designed and implemented a differential interferometer that works in the near infrared domain and uses a new detection method developed for this system. In the fourth part I describe the realisation of a high-speed interferometer with a differential arrangement, which allows evaluation of high-cycle fatigue in material engineering. This method of studying high-cycle fatigue should be beneficial for both the basic research and the engineering practice.
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Surface and Mechanical Properties of Thin Films
Pálesch, Erik ; Klapetek, Petr (referee) ; Skuhurov,, Andrey (referee) ; Čech, Vladimír (advisor)
The doctoral thesis deals with the study of morphology and mechanical properties of thin plasma polymer films based on tetravinylsilane monomer and its mixtures with oxygen and argon. Thin films were prepared by plasma-enhanced chemical vapour deposition on silicon and glass substrates. Atomic force microscopy was used for characterization of thin film surface and for depiction of composite interphase with functional interlayer. Mechanical properties of thin films, namely Young’s modulus and hardness, were studied by cyclic nanoindentation technique. Nanoindentation device was also used to carry out scratch test, which was helpful to describe adhesion of films to substrate. In this thesis the influence of deposition conditions on surface and mechanical properties of thin films prepared in continual and pulse wave on planar substrates is discussed. Also, the suitability of few atomic force microscopy techniques for depiction of composite interphase was reviewed.
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Numerical simulation of the laser light scattering from rough surfaces
Šulc, Václav ; Klapetek, Petr (referee) ; Ohlídal, Miloslav (advisor)
A Matlab numerical model for scattering simulation was proposed based on the solution derived from the Beckmann-Kirchhoff scalar theory of scattering of electromagnetic waves from rough surfaces. A series of various synthetic surface samples were obtained using the open source software Gwyddion on which numerical simulations of scattering were carried out. The validity of this numerical model was tested and compared with experimental results.
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Manufacturing, use and properties of duplex austenitic-ferritic steels
Klapetek, Václav ; Blažík, Petr (referee) ; Myška, Martin (advisor)
This bachelor thesis focuses on stainless duplex austenitic-feritic steels. The first chapter is focused on mechanical and technological properties, microstructure and chemical proposition with its impact on corrosion resistance, following the introduction to the issue. Intermetallic phases and their effect on properties are also described. Second chapter deals with their usage in several industry spheres, such as petrochemical industry, paper-producing, transport and storage of chemicals etc.
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