Original title: Scanning Very Low Energy Electron Microscopy
Authors: Müllerová, Ilona ; Hovorka, Miloš ; Mikmeková, Šárka ; Pokorná, Zuzana ; Mikmeková, Eliška ; Frank, Luděk
Document type: Papers
Conference/Event: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Year: 2011
Language: eng
Abstract: Recent developments in applications of the scanning very low energy electron microscopy in selected branches of materials science are reviewed. The examples include visualization of grains in conductive polycrystals including ultrafine grained metals, identification of the local crystal orientation upon reflectance of very slow electrons, transmission mode with ultrathin free-standing films including graphene, acquisition of a quantitative dopant contrast in semiconductors, and examination of thin surface coverages.
Keywords: dopant contrast; grain contrast; low energy electrons; scanning electron microscopy; thin films; transmitted electrons
Project no.: CEZ:AV0Z20650511 (CEP), GAP108/11/2270 (CEP), IAA100650902 (CEP)
Funding provider: GA ČR, GA AV ČR
Host item entry: NANOCON 2011. 3rd International Conference, ISBN 978-80-87294-27-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0203060

Permalink: http://www.nusl.cz/ntk/nusl-79576


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Conference materials > Papers