Original title: SMV-2024-69: Měřící systémy pro litografy
Translated title: SMV-2024-69: Measuring systems for lithographers
Authors: Mikel, Břetislav
Document type: Research reports
Year: 2024
Language: cze
Abstract: [cze] [eng]
Návrh uspořádání a realizace Optické hlavy pro vlnovou délku 637 nm, která má vstup přizpůsoben vláknovému konektoru FC/PC, na výstupu je laserový svazek zaostřen na vzdálenost 400 mm s šířkou 6-10 mm, tloušťkou max. 60 um a hloubkou ostrosti min. 5 mm. Design and implementation of an optical head for the wavelength of 637 nm, which has an input adapted to the FC/PC fibre connector, at the output the laser beam is focused at a distance of 400 mm with a width of 6-10 mm, a thickness of max. 60 um and a depth of field of min. 5 mm.
Keywords: laser interferometry; laser source; measurement of length

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0360862

Permalink: http://www.nusl.cz/ntk/nusl-668978


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Research > Institutes ASCR > Institute of Scientific Instruments
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