Original title: Analýza ultratenkých vrstev metodami SIMS a TOF-LEIS
Translated title: Ultrathin film analysis by SIMS and TOF-LEIS
Authors: Duda, Radek ; Lörinčík, Jan (referee) ; Bábor, Petr (advisor)
Document type: Master’s theses
Year: 2008
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta strojního inženýrství
Abstract: [cze] [eng]

Keywords: depth profiling; SIMS; ToF-LEIS; hloubkové profilování; SIMS; TOF-LEIS

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/15415

Permalink: http://www.nusl.cz/ntk/nusl-542535


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2024-04-02, last modified 2024-04-03


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