Original title: Enhanced growth rate of diamond films at low temperature in focused microwave plasma system
Authors: Babčenko, Oleg ; Bydžovská, Irena ; Fait, Jan ; Shagieva, Ekaterina ; Ondič, Lukáš ; Kromka, Alexander
Document type: Papers
Conference/Event: 14th International Conference on Nanomaterials - Research & Application - NANOCON 2022, Brno (CZ), 20221019
Year: 2023
Language: eng
Abstract: The low temperature (< 500 °C) diamond film deposition on fused silica in two different focused microwave plasma systems, i.e. a multimode clamshell cavity (MCC) and a rotational ellipsoid cavity (REC) reactor, was investigated. During the experiments, the methane to hydrogen ratio, in the hydrogen-rich process gas mixture, varied from 1 % to 15 % for MCC and from 1 % to 9 % for REC. The grown films were analyzed by scanning electron microscopy and Raman shift measurements. The outcomes of the study and enhanced diamond growth at low temperatures is advantageous for overcoating of fused silica as well as thermally sensitive substrates, e.g. optical elements, photonic crystals, sensors, etc.
Keywords: focused plasma; high growth rate; low non-diamond content; low temperature deposition; well-faceted diamonds
Project no.: LUASK22147, LQ100102001 (CEP), CZ.02.1.01/0.0/0.0/16_019/0000760, EF16_019/0000760
Funding provider: GA MŠk, AV ČR, OP VVV - SOLID21, GA MŠk
Host item entry: NANOCON 2022 Conference Proceedings, ISBN 978-80-88365-09-9, ISSN 2694-930X
Note: Související webová stránka: https://www.confer.cz/nanocon/2022/4587-enhanced-growth-rate-of-diamond-films-at-low-temperature-in-focused-microwave-plasma-system

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0342132

Permalink: http://www.nusl.cz/ntk/nusl-521865


The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers