Original title: SMV-2022-03: Morfologie a diagnostika spektrometrových zrcadel v SEM
Translated title: SMV-2022-03: Morphology and diagnostic of spectrometer mirrors in SEM
Authors: Mika, Filip
Document type: Research reports
Year: 2022
Language: cze
Abstract: [cze] [eng]
Vypracování metodiky přesného určení materiálů a morfologie diagnostických zrcadel s pomocí SEM. Methodology of exact determination of elemental composition and critical dimensions of spectrometer mirrors with the SEM.
Keywords: energy-filtered electron microscopy; morphology; non-charging electron microscopy

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: https://hdl.handle.net/11104/0337340

Permalink: http://www.nusl.cz/ntk/nusl-511995


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports