Název:
Development and measurement of gas sensors for room temperature applications
Autoři:
Kočí, Michal Typ dokumentu: Příspěvky z konference Konference/Akce: Student International Conference on Electrical Engineering - POSTER 2022 /26./, Prague (CZ), 20220512
Rok:
2022
Jazyk:
eng
Abstrakt: Gas sensing properties of a nanocrystalline diamond with a hydrogen-terminated surface (H-terminated NCD) and a molybdenum disulphide (MoS2) are investigated as conductivity sensors with built-in interdigital metal electrode structures. The H-terminated NCD was prepared by plasma-enhanced chemical vapour deposition (PECVD), and the MoS2 by a carbide-free one-zone sulfurization method. The sensor's responses were measured for oxidizing (NO2) and reducing (NH3) gases by the same equipment and setup. The parameters of the tested sensors are compared and critically evaluated. Advantageously, the MoS2/H-terminated NCD heterostructure enhances the gas sensing response at room temperature compared to the H-terminated NCD and MoS2 layers.
Klíčová slova:
gas sensor; nanocrystalline diamond (NCD); transition metal dichalcogenide (TMD) Číslo projektu: SAV-21-10 (CEP) Poskytovatel projektu: AV ČR Zdrojový dokument: Proceedings of the Student International Conference on Electrical Engineering /26./, ISBN 978-80-01-06992-9