Studium struktury a vlastností tenkých vrstev černého hliníku připraveného pomocí magnetronového naprašování

Prokop, Dejan

Black metallic thin films are characterized by their excessively rough fractal-like surface structure. Furthermore, black metal films have a much bigger surface- to-volume ratio compared to classic reflective metals. Therefore, they can be used e.g. as a basis for optical or chemical sensors. In the present bachelor thesis, we study and pro- vide a comparison between the properties of reflective and black thin films with thickness in the range of 50-700 nm prepared by pulsed DC magnetron sputtering. A small amount of nitrogen that is introduced during deposition to a chamber is responsible for a change in the structure and the growth of the black films. Different surface morphology is studied using a contact profilometer, atomic force microscope and scanning electron microscope. The measurements obtained by these instruments provide valuable information regarding the overall surface structure and means of growth. The surface roughness, as well as the mean crystallite size was observed to increase with the thickness of the films. The X-ray diffraction analysis shows that both types of film crystallize in the face-centered cubic crystal structure. Spectrophotometrical measurements of specular reflectance pro- vide quantitative information about the optical properties. The ultraviolet, visible and near-infrared...

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