Original title: Imaging of thermal treated thin films on silicon substrate in the scanning low energy electron microscope
Authors: Zobačová, Jitka ; Mikmeková, Šárka ; Polčák, J. ; Frank, Luděk
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Year: 2010
Language: eng
Abstract: Structure of thin films usually requires to be examined on microscopic level. The research topics like growth and stability of thin films, phase transitions and separation, crystallization, diffusion and defect formation has a need for LEED or XPS as techniques adequate for investigation of atomic transport processes on short length scales. The low energy electron microscopy is a complementary solution for imaging of samples with special concern for knowledge of surface physics and material science. In this contribution the microscopic examination of as-deposited and thermal treated thin films on Si substrates is performed.
Keywords: Si substrate; SLEEM; thin films
Project no.: CEZ:AV0Z20650511 (CEP), IAA100650803 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0190612

Permalink: http://www.nusl.cz/ntk/nusl-41932


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers