Original title: Transmission mode in scanning low enery electron microscope
Authors: Müllerová, Ilona ; Hovorka, Miloš ; Frank, Luděk
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Year: 2010
Language: eng
Abstract: We incorporated the cathode lens (CL) principle, well known from the emission microscope, to the SEM in order to operate at very low landing energies. The primary beam electrons of several keV are decelerated to nearly zero energy of landing on the specimen negatively biased to high potential. Reflected electrons are collected on a grounded detector situated above the sample but the same can be done below the sample of a fair transparency for electrons. High collection efficiency and high amplification of both detectors is secured thanks to the cathode lens field. We use a scintillation detector for the reflected mode and a semiconductor structure for the transmitted electron (TE) mode. In this arrangement resolution of few nm is obtainable across the full energy range.
Keywords: cathode lens; SEM; transmitted electron mode
Project no.: CEZ:AV0Z20650511 (CEP), IAA100650902 (CEP)
Funding provider: GA AV ČR
Host item entry: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0190607

Permalink: http://www.nusl.cz/ntk/nusl-41927


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers