Název: Prospects of the scanning low energy electron microscopy in materials science
Autoři: Mikmeková, Šárka ; Hovorka, Miloš ; Konvalina, Ivo ; Müllerová, Ilona ; Frank, Luděk
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Rok: 2010
Jazyk: eng
Abstrakt: The use of the scanning low energy electron microscopy (SLEEM) has been slowly making its way into the field of materials science, hampered not by limitations in the technique but rather by the relative scarcity of these instruments in research institutes and laboratories. Various techniques exist which are capable of studying the material microstructure, with the scanning electron microscopy (SEM), (scanning) transmission microscopy ((S)TEM) and focused ion beam (FIB) microscopy being perhaps the most known. A specific way to visualizing the microstructure of materials at high spatial resolution, to achieve a high contrast between grains in polycrystals and very fast data acquisition is to use the cathode lens (CL) mode in SEM. The CL mode in the SEM enables us to detect slow but not only slow, high angle scattered electrons that carry mainly crystallographic contrast based on the electron channeling, mostly in the Mott scattering angular range.
Klíčová slova: cathode lens mode; focused ion beam microscopy; scanning electron microscopy; scanning low energy electron microscopy; transmission electron microscopy
Číslo projektu: CEZ:AV0Z20650511 (CEP), OE08012 (CEP)
Poskytovatel projektu: GA MŠk
Zdrojový dokument: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0190605

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-41926


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference