Original title: Modification of the Schottky Fe ZrO/W electron emitter
Authors: Matějka, František ; Horáček, Miroslav ; Kolařík, Vladimír ; Král, Stanislav
Document type: Papers
Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr (CZ), 2010-05-31 / 2010-06-04
Year: 2010
Language: eng
Abstract: A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. We studied the influence of both the surface treatment and the change of the shape of the tip on the emission characteristics.
Keywords: e-beam writing system; point projection; Schottky electron emitter
Project no.: CEZ:AV0Z20650511 (CEP), IAA100650803 (CEP), FR-TI1/576 (CEP), ED0017/01/01
Funding provider: GA AV ČR, GA MPO, GA MŠk
Host item entry: Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-6842-5

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0190597

Permalink: http://www.nusl.cz/ntk/nusl-41918


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers