Original title:
SMV-2019-64: Cs korektor realizovaný pomocí kombinace anulární a kruhové apertury
Translated title:
SMV-2019-64: Circular annular Cs Corrector
Authors:
Radlička, Tomáš Document type: Research reports
Year:
2019
Language:
cze Abstract:
[cze][eng] Studie proveditelnosti, která vyhodnocuje optické vlastnosti korektoru sférické aberace realizovaného kombinací anulární a kruhové apertury.Feasibity study of Annular circular electrode corrector of the spherical aberration. The effect of the corrector was simulated and results were compared with the standard system with circular aperture.
Keywords:
Cs corrector; electron optics; resolutions
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0303620