Original title: Measurement of the form of silicon wafers by white-light interferometry
Translated title: Meření tvaru křemíkových desek pomocí interferometrie v bílém světle
Authors: Pavlíček, Pavel ; Chmelíčková, Hana
Document type: Papers
Conference/Event: SILICON 2008. Scientific and Business Conference /11./, Rožnov pod Radhoštěm (CZ), 2008-11-04 / 2008-11-07
Year: 2008
Language: eng
Abstract: [eng] [cze]
The form of silicon wafer is measured by white-light interferometry with measurement uncertainty about 1 μm. In this way waviness or deviations of the silicon wafers can be measured. Tvar křemíkových desek je měřena pomocí interferometrie v bílém světle s nejistotou přibližně 1 μm. Tímto způsobem je možné měřit zvlnění nebo odchylky křemíkových desek.
Keywords: form; silicon wafer; waviness; white light interferometry
Project no.: CEZ:AV0Z10100522 (CEP), KAN301370701 (CEP)
Funding provider: GA AV ČR
Host item entry: SILICON 2008. 11th Scientific and Business Conference, ISBN 978-80-254-3278-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0169715

Permalink: http://www.nusl.cz/ntk/nusl-39904


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers