Original title: Study of mechanical properties of nanolayered Ti/Ni coatings
Authors: Zábranský, L. ; Václavík, R. ; Přibyl, R. ; Ženíšek, J. ; Souček, P. ; Buršík, Jiří ; Fořt, Tomáš ; Buršíková, V.
Document type: Papers
Conference/Event: NANOCON 2017. International Conference on Nanomaterials - Research & Application /9./, Brno (CZ), 20171018
Year: 2018
Language: eng
Abstract: The aim of the present work was to study the dependence of mechanical properties of Ti/Ni multilayer thin films on the thicknesses of constituent Ti and Ni layers. The multilayer thin films were synthesized by deposition of Ti and Ni layers alternately on single crystalline silicon substrates using direct current magnetron sputtering method. Thicknesses of Ti and Ni layers varied from 1.7 nm to 100 nm. The micro-structure of the multilayer films was studied using X-ray diffraction technique, scanning electron microscopy with focused ion beam technique and transmission electron microscopy. Mechanical properties obtained from nanoindentation experiments were discussed in relation to microstructural observations.
Keywords: magnetron sputtering; multilayers; nanoindentation; TEM; Ti/Ni
Project no.: GA15-17875S (CEP)
Funding provider: GA ČR
Host item entry: NANOCON 2017: Conference Proceedings, ISBN 978-80-87294-81-9

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0291572

Permalink: http://www.nusl.cz/ntk/nusl-391446


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