Original title: Detekce sekundárních elektronů v REM
Translated title: Detection of secondary electrons in SEM
Authors: Konvalina, Ivo ; Hovorka, Miloš ; Wandrol, P. ; Mika, Filip ; Müllerová, Ilona
Document type: Papers
Conference/Event: Mikroskopie 2008, Nové Město na Moravě (CZ), 2008-02-07 / 2008-02-08
Year: 2008
Language: cze
Abstract: [cze] [eng]
Tři systémy detektorů sekundárních elektronů byly simulovány za účelem zjištění, která část emitovaných sekundárních elektronů je detekována. The three detection systems of secondary electrons were simulated in order to determine which part of the emitted SEs is collected.
Keywords: detection systems; secondary electrons; SEM
Project no.: CEZ:AV0Z20650511 (CEP)
Host item entry: Mikroskopie 2008, ISBN N

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0160920

Permalink: http://www.nusl.cz/ntk/nusl-38797


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers