Original title: Study of mechanical properties of NCD coatings
Translated title: Studium mechanických vlastností NCD vrstev
Authors: Buršíková, V. ; Buršík, Jiří ; Karásková, M. ; Jašek, O. ; Zajíčková, L. ; Franta, D. ; Klapetek, P. ; Bláhová, O.
Document type: Papers
Conference/Event: Coatings and Layers 2007, Rožnov pod Radhoštěm (CZ), 2007-10-29 / 2007-10-30
Year: 2007
Language: eng
Abstract: [eng] [cze]
The aim of the paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. Byly připraveny nanokompozitní diamantové vrstvy (NCD)pomocí mikrovlnné PECVD doplněné RF indukovaným stejnosměrným záporným předpětím (-125 V)v reaktoru typu ASTEX.
Keywords: microwave PECVD; nanocrystalline diamond
Project no.: CEZ:AV0Z20410507 (CEP), GA202/05/0607 (CEP)
Funding provider: GA ČR
Host item entry: Vrstvy a povlaky 2007

Institution: Institute of Physics of Materials AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0152188

Permalink: http://www.nusl.cz/ntk/nusl-37903


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Research > Institutes ASCR > Institute of Physics of Materials
Conference materials > Papers