Název:
Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition
Autoři:
Buršíková, V. ; Homola, V. ; Peřina, Vratislav Typ dokumentu: Příspěvky z konference Konference/Akce: 7th International Conference on Nanomaterials - Research and Application, Brno (CZ), 20151014
Rok:
2015
Jazyk:
eng
Abstrakt: The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/ oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.
Klíčová slova:
hexamethyldisiloxane; mechanical properties; PECVD Zdrojový dokument: NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings, ISBN 978-80-87294-63-5
Instituce: Ústav jaderné fyziky AV ČR
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Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0281200