Original title: Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition
Authors: Buršíková, V. ; Homola, V. ; Peřina, Vratislav
Document type: Papers
Conference/Event: 7th International Conference on Nanomaterials - Research and Application, Brno (CZ), 20151014
Year: 2015
Language: eng
Abstract: The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/ oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.
Keywords: hexamethyldisiloxane; mechanical properties; PECVD
Host item entry: NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings, ISBN 978-80-87294-63-5

Institution: Nuclear Physics Institute AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0281200

Permalink: http://www.nusl.cz/ntk/nusl-371578


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Research > Institutes ASCR > Nuclear Physics Institute
Conference materials > Papers