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Original title:
Termomechanická stabilita DLC/SiOx vrstev
Translated title:
Thermomechanical stability of DLC/SiOx films
Authors:
Buršíková, V.
;
Buršík, Jiří
;
Sťahel, P.
;
Klapetek, P.
;
Bláhová, O.
Document type:
Papers
Conference/Event:
Vrstvy a povlaky 2006
, Rožnov pod Radhoštěm (CZ), 2006-10-10 / 2006-10-11
Year:
2006
Language:
cze
Abstract:
[cze]
[eng]
Termomechanická stabilita DLC/SiOx vrstev.
Thermomechanical stability of DLC/SiOx films.
Keywords:
DLC
;
plasma enhanced chemical vapor deposition
;
thermal stability
Project no.:
CEZ:AV0Z20410507
(
CEP
),
GA202/05/0607
(
CEP
)
Funding provider:
GA ČR
Host item entry:
Vrstvy a povlaky /5./, ISBN 80-969310-2-4
Institution:
Institute of Physics of Materials AS ČR (
web
)
Document availability information:
Fulltext is available at the institute of the Academy of Sciences.
Original record:
http://hdl.handle.net/11104/0138060
Permalink:
http://www.nusl.cz/ntk/nusl-35986
The record appears in these collections:
Research
>
Institutes ASCR
>
Institute of Physics of Materials
Conference materials
>
Papers
Record created 2011-07-01, last modified 2024-01-26
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