Original title: Geometrical aspects of connection between surface reggedness and resistance of thin films
Authors: Franc, J. ; Janda, Pavel ; Novotný, Jan
Document type: Papers
Conference/Event: Applied Electronics 2003, Pilsen (CZ), 2003-09-10 / 2003-09-11
Year: 2003
Language: eng
Abstract: The relationship between the ruggedness of substrate surface and the resistance of sputtered NiCr films was studied. The geometrical model in which the surface unevenness is simulated by pyramid was derived. The increase of R/ on a rugged surface in comparison with a polished one was calculated. Ruggedness on real surfaces was analysed by means of AFM microscopy. Obtained data were compared with the model.
Keywords: epitaxial layers; measurement; optoelectronic devices
Project no.: CEZ:AV0Z2067918 (CEP), KSK1010104 Projekt 04/01:4046 (CEP)
Funding provider: GA AV ČR
Host item entry: Applied Electronics 2003

Institution: Institute of Photonics and Electronics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0114318

Permalink: http://www.nusl.cz/ntk/nusl-32551


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Research > Institutes ASCR > Institute of Photonics and Electronics
Conference materials > Papers